Axcelis Technologies Inc
NASDAQ: ACLS · TECHNOLOGY · SEMICONDUCTOR EQUIPMENT & MATERIALS
Updated 2026-06-05
Axcelis Technologies Inc (ACLS) Financial statements
SEC filings — annual and quarterly data.
Cash flow — annual
| Item | 2006 | 2007 | 2008 | 2009 | 2010 | 2011 | 2012 | 2013 | 2014 | 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Operating cash flow | $19.02M | $-31.10M | $-48.72M | $-33.94M | $-5.89M | $3.53M | $-10.60M | $-15.04M | $-16.05M | $18.26M | $-8.80M | $56.28M | $46.97M | $-13.59M | $69.70M | $150.19M | $215.61M | $156.87M | $140.82M | $118.31M |
| Capital expenditures | $6.92M | $10.39M | $3.41M | $463000.00 | $1.40M | $2.12M | $591000.00 | $822000.00 | $1.02M | $1.83M | $2.51M | $7.29M | $4.71M | $11.97M | $7.43M | $8.72M | $10.68M | $20.66M | $12.18M | $11.29M |
| Depreciation | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — |
| Stock-based comp | $5.47M | $5.53M | $4.71M | $4.65M | $4.09M | $4.69M | $3.98M | $4.34M | $4.81M | $5.58M | $5.18M | $5.67M | $7.78M | $8.17M | $10.48M | $12.07M | $13.44M | $18.27M | $20.95M | $20.77M |
| Free cash flow | $12.09M | $-41.49M | $-52.13M | $-34.41M | $-7.29M | $1.41M | $-11.19M | $-15.86M | $-17.07M | $16.43M | $-11.30M | $49.00M | $42.25M | $-25.56M | $62.27M | $141.47M | $204.92M | $136.21M | $128.64M | $107.01M |
| Investing cash flow | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — |
| Financing cash flow | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — |
| Dividends paid | — | $12.42M | $2.02M | — | — | $0.00 | $0.00 | $0.00 | — | $0.00 | $0.00 | $0.00 | — | — | $9.43M | $4.87M | — | $1.00 | — | — |
| Share repurchases | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — |
| Debt repayment | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — | — |
| Net change in cash | — | — | — | — | — | $1.13M | $-1.89M | $1.30M | $-15.54M | $48.14M | $-8.10M | $63.23M | $44.02M | $-38.37M | $57.70M | $91.45M | $-107.13M | — | — | — |
Frequently asked questions
What is Axcelis Technologies Inc's revenue?
Axcelis Technologies Inc's trailing twelve-month revenue is $845.44M, and consensus projects about $1.55B by 2030. Revenue is the top line the whole model builds on, and at this scale the question shifts from how fast it grows to whether margins hold as it compounds.
How profitable is ACLS?
In its most recent fiscal year, ACLS ran a gross margin of 44.91%, an operating margin of 14.22%, and a net margin of 14.33%. Margins this high mean most of each extra dollar of revenue drops through to profit, which is the signature of real pricing power.
How much free cash flow does ACLS generate?
ACLS produced $107.01M in free cash flow in its most recent fiscal year. Free cash flow is what is left after running and reinvesting in the business, and it is the cash that actually funds buybacks, dividends, and a stronger balance sheet.
Is ACLS's balance sheet healthy?
ACLS holds $145.45M in cash and equivalents against — in long-term debt, on $1.03B of shareholder equity. That debt is best read against the cash flow the business throws off each year.